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Novel approach to short-pulse and ultra-short pulse laser ablation of silicon nitride passivation layers

 
: Schulz-Ruhtenberg, M.; Trusheim, D.; Smeets, M.; Holtkamp, J.; Gillner, A.

:
Postprint urn:nbn:de:0011-n-2542244 (852 KByte PDF)
MD5 Fingerprint: 9e2298278652a09a2e977e0a29028691
Erstellt am: 8.8.2014


Reutzel, E.W. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Laser material processing for solar energy : 15 - 16 August 2012, San Diego, California, United States
Bellingham, WA: SPIE, 2012 (Proceedings of SPIE 8473)
ISBN: 978-0-8194-9190-9
Art. 84730Q
Conference "Laser Material Processing for Solar Energy" <2012, San Diego/Calif.>
Englisch
Konferenzbeitrag, Elektronische Publikation
Fraunhofer ILT ()

Abstract
Laser ablation of passivation layers is one of the most promising processes for high efficiency cell concepts in high throughput solar cell production. Especially on the front side a depth- or material-selective ablation process is required to avoid damage to the sensitive emitter. To develop a fast and reliable laser ablation process with a minimum amount of damage to the emitter it is vital to use the most suitable laser source and to optimize the processing parameters. For identification of the influence of pulse duration on cell performance after ablation a new experimental approach is chosen, where full crystalline solar cells are used as samples. In an iterative experimental sequence ablation of lines between the fingers is alternated with Suns-Voc measurements. The measurements reveal the impact of the laser ablation process on the electrical properties of the solar cell, like pseudo fill factor and open circuit voltage. The method has two decisive advantages com pared to other approaches presented in earlier works: a) the preparation of special samples (e.g. full cells without front metallization) is not required and reliable commercially available standard cells can be used instead; b) the iterative nature of the approach allows an extrapolation to larger ablated areas.

: http://publica.fraunhofer.de/dokumente/N-254224.html