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Wafer level approaches for carbon nanotube integration in interconnects and MEMS/NEMS
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2012
Conference Paper
Titel
Wafer level approaches for carbon nanotube integration in interconnects and MEMS/NEMS
Author(s)
Hermann, Sascha
Schulz, Stefan E.
Geßner, Thomas
Hauptwerk
Advanced Metallization Conference 2012
Konferenz
Advanced Metallization Conference 2012
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS