Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Setup for measuring the resonance characteristics of high-frequency microtransducers

Ukad do pomiaru charakterystyk rezonansowych mikroprzetworników wysokocze{ogonek}stotliwociowych
 
: Maozie, G.; Nieradka, K.; Kopiec, D.; Ritz, Y.; Zschech, E.; Gotszalk, T.

Przeglad elektrotechniczny = Electrical review 88 (2012), Nr.10B, S.64-66
ISSN: 0033-2097
Englisch, Polnisch
Zeitschriftenaufsatz
Fraunhofer IZFP, Institutsteil Dresden ( IKTS-MD) ()

Abstract
In this paper we describe a system for measuring the resonance characteristics of the silicon cantilever. The method of preparation spring cantilevers is presented. The construction of a specialized optical system to detect the deflection of the cantilevers and the principle of detection the cantilevers deflection is described. The new method based on the modulated laser beam, to measure characteristics of the high frequency transducers, is presented.

: http://publica.fraunhofer.de/dokumente/N-254034.html