English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Fabrication of subwavelength holes using nanoimprint lithography
Details
Full
Export
Statistics
Options
2013
Conference Paper
Titel
Fabrication of subwavelength holes using nanoimprint lithography
Author(s)
Weiß, Alexander
Besser, J.
Baum, Mario
Saupe, Ray
Otto, Thomas
Geßner, Thomas
Hauptwerk
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI
Konferenz
Conference "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics" 2013
DOI
10.1117/12.2014273
Language
English
google-scholar
View Details
Fraunhofer-Institut für Elektronische Nanosysteme ENAS