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Chemical vapor deposition of diamond films
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2000
Book Article
Titel
Chemical vapor deposition of diamond films
Author(s)
Klages, C.-P.
Hauptwerk
Handbook of ceramic hard materials. Vol.1
DOI
10.1002/9783527618217.ch13
Language
English
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Fraunhofer-Institut für Schicht- und Oberflächentechnik IST