Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Scattering reduction through oblique multilayer deposition
| Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings (OIC) 2013. OSA Topical Meeting. Technical digest. CD-ROM : 16 - 21 June 2013, Whistler, British Columbia, Canada
Washington, DC: OSA, 2013
ISBN: 978-1-55752-970-1
Paper FC.4 |
| Topical Meeting "Optical Interference Coatings" (OIC) <2013, Whistler> |
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| Englisch |
| Konferenzbeitrag |
| Fraunhofer IOF () |
Abstract
Scattering from multilayers depends on the roughness of each interface and their cross-correlation properties. Oblique deposition of thin films allows tailoring these properties and thus the scattering which will be illustrated for Mo/Si multilayers.