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Wear resistant thin film sensors for monotoring force and temperature in the track of ball bearings

: Biehl, S.; Lüthje, H.

Natale, C. di:
Eurosensors XVIII. Digest of technical papers : 18th European Conference on Solid-State Sensors: September 12 - 15, 2004, Rome, Italy, Pontificia Universitas Sancto Thoma Aquinate in Urbe
Rom, 2004
Eurosensors <18, 2004, Roma>
Fraunhofer IST ()
microsensor; bearing; structure; structuring

This paper deals with the farbrication of novel sensorintegrated ball bearings for direct measurement of the current surface temperature and the load of the individual balls and their distribution during operation. This was performed by nanostructured amorphous carbon films for force detection and ultra thin thermoresistive films. Microstructuring was done by laser or lithographic processes.