Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

On the calculation of hall factors for the characterization of electronic devices

Über die Berechnung von Hallfaktoren für die Charakterisierung von elektronischen Bauelementen
 
: Uhnevionak, V.; Burenkov, A.; Pichler, P.

:
Postprint urn:nbn:de:0011-n-2470436 (207 KByte PDF)
MD5 Fingerprint: d4bff17ada7cf0475163beb9ba0ab22d
© 2013 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Erstellt am: 4.7.2013


Institute of Electrical and Electronics Engineers -IEEE-:
PRIME 2013, 9th Conference on Ph.D. Research in Microelectronics and Electronics : Villach, Austria, June 24th-27th, 2013
New York, NY: IEEE, 2013
ISBN: 978-1-4673-4580-4 (Print)
S.241-244
Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) <9, 2013, Villach>
Bundesministerium für Bildung und Forschung BMBF
01SF0804; MobiSiC
Englisch
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IISB ()
hall factor; hall measurements; relaxation (scattering) time; mobility; bulk silicon

Abstract
In this work, a new method for the calculation of Hall factors is described. It is based on the interdependence with mobility components via the respective relaxation (scattering) times. The new method allows an accurate determination of mobility and carrier sheet concentration from Hall-effect measurements and can not only be applied to homogeneously doped substrates but also at the interfaces of electronic devices such as field-effect transistors. To demonstrate the general applicability of the method, we use it to predict the dependence of the Hall factor on dopant concentration in silicon and compare it with measured Hall factors reported in the literature.

: http://publica.fraunhofer.de/dokumente/N-247043.html