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MOEMS tunable microlens made of aluminum nitride membranes

: Leopold, S.; Polster, T.; Pätz, D.; Knöbber, F.; Ambacher, O.; Sinzinger, S.; Hoffmann, M.


Journal of micro/nanolithography, MEMS and MOEMS 12 (2013), Nr.2, Art. 023012, 8 S.
ISSN: 1537-1646
ISSN: 1932-5150
ISSN: 1932-5134
Fraunhofer IAF ()

We present tunable lenses based on aluminum nitride membranes. The achievable tuning range in the refractive power is 0 to 25 dpt with an external pressure load of <= 20 kPa. The lenses are manufactured using MOEMS technology. For 500-nm-thick membranes with a diameter of 3 mm, a spherical deflection profile is found. The system provides good long-term stability showing no creep or hysteresis. A model for the refractive power versus applied pressure is derived and validated experimentally. Based on this model, design guidelines are discussed. One essential parameter is the residual stress of the aluminum nitride layer that can be controlled during deposition.