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Micro-optical system as integration platform for III-N nanowire based opto-chemical detectors

: Kleindienst, R.; Cimalla, V.; Eickhoff, M.; Grewe, A.; Holc, K.; Schätzle, J.; Schwarz, U.; Teubert, J.; Sinzinger, S.


Freymann, Georg von (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI : 2.-7.2.2013, San Francisco, CA, USA
Bellingham, WA: SPIE, 2013 (Proceedings of SPIE 8613)
ISBN: 978-0-8194-9382-8
Paper 861315
Conference "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics" <6, 2013, San Francisco/Calif.>
Fraunhofer IAF ()
III-V nanowires; gas-detection; beam-shaping; optical design; ultra precision machining

The highly sensitive photoluminescence (PL) response of group III-Nitrides (III-N) nanowire heterostructures (NWHs) to hydrogen (H2) and oxygen (O2) allows for the realization of reliable gas detectors. For industrial real time gas monitoring applications, e.g. in the field of aerospace, a large scale laboratory setup was miniaturized by integrating electro-optical components and the NWHs within a robust micro optical system. As a result of the all optical addressing and read out the detection periphery can be completely isolated from the investigated environment which significantly increases the detection sensitivity. The optical design and fabrication techniques as well as an experimental investigation of the system performance are the main topics discussed in this paper.