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High speed micro scanner for 3D in-volume laser micro-processing

: Schaefer, D.

Volltext urn:nbn:de:0011-n-2388179 (723 KByte PDF)
MD5 Fingerprint: e6e11858a68945cf3233cd5747f9f391
Copyright 2013 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Erstellt am: 3.5.2013

Klotzbach, U.; Lu, Y.; Washio. K. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Laser-based Micro- and Nanopackaging and Assembly VII : 6-7 February 2013, San Francisco
Bellingham, WA: SPIE, 2013 (Proceedings of SPIE 8608)
ISBN: 978-0-8194-9377-4
8608 08
Conference "Laser-based Micro- and Nanopackaging and Assembly" <7, 2013, San Francisco/Calif.>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer ILT ()