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Impact of the solvent properties on the morphology of the silicon surface generated by laser ablation under a solvent film

: Sierra Trillo, M.; Glatthaar, M.; Hopman, S.; Krossing, I.

Volltext urn:nbn:de:0011-n-2366204 (727 KByte PDF)
MD5 Fingerprint: ce81f1a0f06ad7f11c27e2398dd64fa0
Erstellt am: 13.4.2013

Nowak, S. ; European Commission:
27th European Photovoltaic Solar Energy Conference and Exhibition, EU PVSEC 2012. DVD-ROM : Proceedings of the international conference held in Frankfurt, Germany, 24 - 28 September 2012
München: WIP-Renewable Energies, 2012
ISBN: 3-936338-28-0
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <27, 2012, Frankfurt>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer ISE ()
Solarzellen - Entwicklung und Charakterisierung; Silicium-Photovoltaik; Dotierung und Diffusion; Kontaktierung und Strukturierung; Produktionsanlagen und Prozessentwicklung

An improvement in Silicon ablation by lasers is achieved when laser ablation takes place under a thin liquid film. Therefore it is necessary to investigate the effects of the liquid on the silicon surface during laser irradiation. Different types of microstructures observed on the silicon [100]-surface of a Si-wafer after nanosecond-pulsed laser irradiation under liquid films of molecular solvents are presented to complete our understanding of the Laser Chemical Processing (LCP). Water and perfluorocarbons (PFCs) are hitherto employed as liquid media due to their high thermal and chemical stability in the LCP. Here we report on results obtained with a new reactor that allows studying the stability of solvents occurring during the laser irradiation and the effects of solvents on the silicon surface during and after laser irradiation.