Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Silicon doping performed by different diffusion sources aiming co-diffusion

: Keding, R.

Volltext urn:nbn:de:0011-n-2365402 (190 KByte PDF)
MD5 Fingerprint: bb7e42975615e8d44a466ae0187b5dee
Erstellt am: 27.4.2013

Nowak, S. ; European Commission:
27th European Photovoltaic Solar Energy Conference and Exhibition, EU PVSEC 2012. DVD-ROM : Proceedings of the international conference held in Frankfurt, Germany, 24 - 28 September 2012
München: WIP-Renewable Energies, 2012
ISBN: 3-936338-28-0
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <27, 2012, Frankfurt>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer ISE ()
PV Produktionstechnologie und Qualitätssicherung; Silicium-Photovoltaik; Produktionsanlagen und Prozessentwicklung

In this work several diffusion sources are investigated, aiming at simultaneous phosphorus and boron doping of silicon from different diffusion sources. This challenging process step is called co-diffusion. In the context of this work boron- and phosphorus-doped silicate glass (BSG and PSG) as solid diffusion sources and phosphorus oxychloride (POCl3) as gaseous precursor for phosphorus diffusion are investigated. The combination of solid and gaseous diffusion sources leads to a high flexibility in adjusting sheet resistances on the one hand and to a simplification of process flows on the other. In this work the sheet resistance of p+-doped areas is varied in the range of Rsh = 50 - 300 ohm/sq by varying composition and thickness of the solid diffusion sources. The deposition of these solid diffusion sources is carried out by plasma-enhanced chemical vapor deposition (PECVD) using two different process equipments. The excellent passivation capability of the highly p+-doped silicon surfaces has lead to dark saturation current densities J0 = 29.6 fA/cm². In the case of silicon n+-doping with gaseous diffusion sources, the variation of sheet resistance is possible by adjusting the gaseous composition in the ambience during diffusion. The sheet resistance has been varied in the range of Rsh = 50-500 ohm/sq. In the case of n+-doping the measured dark saturation current densities have been J0 = 58.6 fA/cm2 and thus show the high potential of these diffusions for implementation in process sequences of high efficiency silicon solar cells.