Abstract
Local electronic properties of the laser-fired contacts (LFCs) are strongly determined by their microstructure and underlying process parameters. In this paper preparation techniques and analytical tools for the electronic characterization on a micrometer-scale and correlated microstructure material properties of individual LFCs have been applied. Lock-in Thermography (LIT) images allow a simple and non-destructive statistical evaluation of a larger number of LFCs in overview as well as high resolution images of local dissipative structures. The resistance of single isolated LFCs measured through four-terminal sensing is correlated with general properties investigated through high-resolution LIT and SEM/EDX. The local element composition within and below LFCs is analyzed by acquisition of depth profiles using dual beam time-of-flight secondary ion mass spectroscopy (ToF-SIMS). In addition, areas with non-linear electrical characteristics were localized by means of mapping space charge regions in the contact area with measurements of electron beam induced current (SEM/EBIC).