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2012
Conference Paper
Titel
Optical simulation of transparent conductive oxide (TCO) films on borate glasses
Abstract
Two different transparent conductive oxides (TCO) were deposited by magnetron sputtering on borate glasses. The influence of sputtering conditions on optical, electrical and microstructural properties was much higher for indium tin oxide (ITO) than for aluminium-doped zinc oxide (AZO) films. Specific resistivity values obtained from simulation of the optical spectra are in good agreement with values obtained from four-point probe measurements.