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Fully automated concentration control of the acidic texturisation process

: Dannenberg, T.; Zimmer, M.; Rentsch, J.

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Energy Procedia 27 (2012), S.617-623
ISSN: 1876-6102
International Conference on Crystalline Silicon Photovoltaics (SiliconPV) <2, 2012, Leuven>
Zeitschriftenaufsatz, Konferenzbeitrag, Elektronische Publikation
Fraunhofer ISE ()
PV Produktionstechnologie und Qualitätssicherung; Silicium-Photovoltaik; Charakterisierung; Zellen und Module

To enable a concentration control in the acidic texturing process we have closed the feedback loop from analytical data to the dosing mechanism of the used process tool. In order to analyze the process bath we used near-infrared spectroscopy in an online setup as well as ion chromatography as an inline method in a second approach. Using the developed dosing algorithm allows a concentration optimization of HF and HNO3 in dependence of the Si concentrations. This allows a further optimization of the acidic texturing process and leads to more homogeneous process results.