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Conductive AFM for CNT characterization

: Toader, M.; Fiedler, H.; Hermann, S.; Schulz, S.E.; Gessner, T.; Hietschold, M.

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Nanoscale research letters : NRL 8 (2013), Art. 24, 6 S.
ISSN: 1931-7573
ISSN: 1556-276X
International Conference on Superlattices, Nanostructures, and Nanodevices (ICSNN) <2012, Dresden>
Deutsche Forschungsgemeinschaft DFG
GRK 1215;
Zeitschriftenaufsatz, Konferenzbeitrag, Elektronische Publikation
Fraunhofer ENAS ()

We report on and emphasize the versatility of conductive atomic force microscopy in characterizing vertically aligned carbon nanotubes (CNTs) aimed to be used in via interconnect technology. The study is conducted on multi-walled CNT arrays vertically grown on a copper-based metal line. Voltage-dependent current mapping and current-voltage characteristics recorded down to single CNT allow for a comprehensive insight into the electric behaviour of the hybrid structure.