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Recycling of cantilevers for nanoparticle detection by lift-off technique

: Merzsch, S.


Moos, R. ; AMA Service GmbH, Wunstorf:
IMCS 2012, 14th International Meeting on Chemical Sensors. Proceedings. CD-ROM : May 20 - 23, 2012, Nuremberg, Germany
Wunstorf: AMA Service, 2012
ISBN: 978-3-9813484-2-2 (Proceedings)
ISBN: 978-3-9813484-1-5 (Booklet with Abstracts)
International Meeting on Chemical Sensors (IMCS) <14, 2012, Nuremberg>
Fraunhofer WKI ()
nanoparticle; cantilever; cleaning; resonant frequency

Monitoring of engineered airborne nanoparticles is prerequisite to their safe industrial use. Workmen, inhaling particles, are endangered to sustain health hazards. A silicon resonant cantilever sensor has been proven a tool for sampling and recognizing airborne particles at high sensitivity. For repeated usability of the resonator the trapped particles have to be removed which is accomplished by a sacrificial layer deposited on the polluted cantilever surface. Particles, forced by an electrostatic field, settle on top of the layer in spite of the silicon. Within a wet cleaning, not only the additional layer is removed, but also the trapped nanoparticles. This method has been proven by using titanium or conventional photoresist as a covering layer. For the latter, cleaning efficiency is proven by detection of resonant frequency.