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2012
Conference Paper
Titel
Pseudo 3-D multiphysics simulation of a hydride vapor phase epitaxy reactor
Alternative
Pseudodreidimensionale Multipysiksimulation eines Reaktors zur epitaktischen Gasphasenabscheidung (HVPE-Reaktor)
Abstract
Gallium nitride (GaN) and its related nitride alloys with special physical properties are in technical areas of high interest. The growing of gallium nitride boules on non-native sapphire or silicon carbide requires complicated mechanisms of defect reduction in the lattice structure. Thus the production of gallium nitride substrates is a challenge. Hydride Vapor Phase Epitaxy (HVPE) is a promising technology for the production of large GaN bouls. In this study COMSOL Multiphysics is used for the simulation of non-isothermal flow and the mass transport. In this study a pseudo-3D simulation of non-isothermal flow and mass transport have been performed to analyze the influence of the reactor geometry and several process parameters.
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