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Pseudo 3-D multiphysics simulation of a hydride vapor phase epitaxy reactor

Pseudodreidimensionale Multipysiksimulation eines Reaktors zur epitaktischen Gasphasenabscheidung (HVPE-Reaktor)
: Hackert-Oschätzchen, Matthias; Schubert, Andreas; Penzel, Michael; Plänitz, Philipp

COMSOL Conference 2012. CD-ROM : October 10 - 12, 2012, Milano
Milano, 2012
ISBN: 978-0-9839688-7-0
ISBN: 0-9839688-7-X
5 S.
COMSOL Conference <2012, Milano>
Fraunhofer IWU ()
multiphysics-simulation; hydride vapor phase epitaxy reactor; non-isothermal flow; transport of diluted species

Gallium nitride (GaN) and its related nitride alloys with special physical properties are in technical areas of high interest. The growing of gallium nitride boules on non-native sapphire or silicon carbide requires complicated mechanisms of defect reduction in the lattice structure. Thus the production of gallium nitride substrates is a challenge. Hydride Vapor Phase Epitaxy (HVPE) is a promising technology for the production of large GaN bouls. In this study COMSOL Multiphysics is used for the simulation of non-isothermal flow and the mass transport. In this study a pseudo-3D simulation of non-isothermal flow and mass transport have been performed to analyze the influence of the reactor geometry and several process parameters.