English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Have you forgotten your password?
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
The development path of electrostatic resonant to electrostatic quasistatic driven micro scanning mirrors
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
2012
Conference Paper
Title
The development path of electrostatic resonant to electrostatic quasistatic driven micro scanning mirrors
Author(s)
Grahman, Jan
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Jung, Denis
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Kallweit, David
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Sandner, Thilo
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Graßhoff, Thomas
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Schenk, Harald
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Mainwork
Smart Systems Integration 2012. CD-ROM
Project(s)
TACO
Funder
European Commission EC
Conference
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2012
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
