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The development path of electrostatic resonant to electrostatic quasistatic driven micro scanning mirrors
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2012
Conference Paper
Title
The development path of electrostatic resonant to electrostatic quasistatic driven micro scanning mirrors
Author(s)
Grahman, Jan
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Jung, Denis
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Kallweit, David
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Sandner, Thilo
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Graßhoff, Thomas
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Schenk, Harald
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Mainwork
Smart Systems Integration 2012. CD-ROM
Project(s)
TACO
Funder
European Commission EC
Conference
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2012
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
