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2012
Conference Paper
Titel
Biaxial resonant 7mm-MEMS mirror for automotive LIDAR application
Abstract
A resonant biaxial comb-actuated 7mm-MEMS scanning mirror with tripod-suspension is developed to provide omnidirectional scanning in an automotive time-of-flight LIDAR sensor application. Wafer level vacuum packaging technology is applied to enable circular scanning at 550Hz at large tilt angle.