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Status of ion projection lithography
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2001
Conference Paper
Titel
Status of ion projection lithography
Author(s)
BrĂ¼nger, W.
Kaesmaier, R.
Loeschner, H.
Springer, R.
Hauptwerk
Nonlithographic and lithographic methods of nanofabrication. From ultralarge-scale integration to photonics to molecular electronics
Konferenz
Symposium D: Nonlithographic and lithographic methods for Nanofabrication - From Ultralarge-Scale Integration to Photonics to Molecular Electronics 2000
Materials Research Society (Fall Meeting) 2000
Language
English
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Fraunhofer-Institut fĂ¼r Siliziumtechnologie ISIT