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Influence of different treatment techniques on the barrier properties of MOCVD TiN against copper diffusion

	DeSanti, G.: Materials for advanced metallization : Proceedings of the Fourth European Workshop on Materials for Advanced Metallization, Stresa, Italy, February 28 - March 1, 2000. MAM 2000 Amsterdam: Elsevier, 2001 (Microelectronic engineering ; 55,1/4 55.2001,Nr.1/4) S.213-218
	European Workshop on Materials for Advanced Metallization (MAM) <4, 2000, Stresa>

	Englisch
	Konferenzbeitrag, Zeitschriftenaufsatz
	Fraunhofer IZM ()