Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Influence of different treatment techniques on the barrier properties of MOCVD TiN against copper diffusion
| DeSanti, G.:
Materials for advanced metallization : Proceedings of the Fourth European Workshop on Materials for Advanced Metallization, Stresa, Italy, February 28 - March 1, 2000. MAM 2000
Amsterdam: Elsevier, 2001 (Microelectronic engineering ; 55,1/4 55.2001,Nr.1/4)
S.213-218 |
| European Workshop on Materials for Advanced Metallization (MAM) <4, 2000, Stresa> |
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| Englisch |
| Konferenzbeitrag, Zeitschriftenaufsatz |
| Fraunhofer IZM () |