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Solid Phase Crystallisation and Rapid Thermal Annealing Processes for Crystalline Silicon on Glass in a Moveable Two Sided Halogen Lamp Oven

: Lindekugel, S.; Flatten, L.; Janz, S.; Dore, J.

Volltext urn:nbn:de:0011-n-2210351 (280 KByte PDF)
MD5 Fingerprint: f93e7d57dbfa66f0194f0bdbf93584d6
Erstellt am: 7.12.2012

European Commission:
26th European Photovoltaic Solar Energy Conference and Exhibition, EU PVSEC. Proceedings : 5th to 9th September 2011 at the CCH - Congress Centre and International Fair Hamburg in Germany
München: WIP-Renewable Energies, 2011
ISBN: 3-936338-27-2
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <26, 2011, Hamburg>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer ISE ()
Materialien - Solarzellen und Technologie; Silicium-Photovoltaik; Kristalline Silicium- Dünnschichtsolarzellen

This paper presents the investigations on application of solid phase crystallisation (SPC) and rapid thermal annealing (RTA) processes on crystalline silicon on glass (CSG) material in a movable two sided halogen lamp oven. We show that a two sided, halogen lamp heated, movable oven bares the possibility of applying spatial as well as temporal temperature gradients along and even throughout the sample. With this technique, steep temperature profiles and different temperatures at the glass and the Si side of a sample are possible. We have been able to process samples at temperatures of more than 1160 °C very successfully. Both SPC and RTA processes have been introduced and first results will be shown. Keywords: c-Si-thin-films, halogen lamp, RTA, SPC