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In-situ diagnostics on fs-laser-induced modification of glasses for selective etching

 
: Hermans, M.; Gottmann, J.; Schiffer, A.

:
Postprint urn:nbn:de:0011-n-2208707 (626 KByte PDF)
MD5 Fingerprint: 08e15aff2f00b7c85f5489368bfef7af
Erstellt am: 8.8.2014


Bachmann, F.G. (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Laser-based Micro- and Nanopackaging and Assembly VI : San Francisco, California, USA, January 2012
Bellingham, WA: SPIE, 2012 (Proceedings of SPIE 8244)
ISBN: 978-0-8194-8887-9
Paper 82440E
Conference "Laser-Based Micro- and Nanopackaging and Assembly" <6, 2012, San Francisco/Calif.>
Englisch
Konferenzbeitrag, Elektronische Publikation
Fraunhofer ILT ()

Abstract
In-situ observation of the in-volume modification of glasses by focused ultra-short pulsed laser radiation with an interferometer microscope allows for the spatially resolved measurement of the transient optical path difference (OPD) in the surrounding of the laser-induced modification. By the relation of refractive index and temperature an estimation of temperature during modification process is possible. The absorption of the laser radiation is measured and is, together with the estimation of processing temperature during modification, a first step towards a process model for the induced modifications of the transparent material.

: http://publica.fraunhofer.de/dokumente/N-220870.html