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Waveguide grating radial polarizer for the photolithography of circularly symmetrical optical elements

: Jourlin, Yves; Tonchev, Svetlen; Parriaux, Olivier; Sauvage-Vincent, Jean; Harzendorf, Torsten; Zeitner, Uwe D.

Postprint (PDF; )

IEEE photonics journal 4 (2012), Nr.5, S.1728-1736
ISSN: 1943-0655
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IOF ()
phase mask; radial polarization; waveguide gratings

A radially periodic slab waveguide grating of concentric circular lines composed of a corrugated quartz substrate and a ZnS waveguiding layer under the condition of normal incidence $ hbox{TE} {0}$ mode coupling at the 442-nm wavelength of a circularly polarized HeCd laser exposure beam causes a close to 100% reflection of the local TE polarization and a high transmission of the local TM polarization, thus transmitting a radially polarized beam. The functionality demonstration is first made with a grating written by e-beam; then, the same element is obtained by means of a phase-mask projection with radial spatial frequency doubling with the first element used as a radial polarizer.