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Aerosol printed co- and post-fired functional films for LTCC-multilayer components

: Partsch, U.; Mosch, S.; Ihle, M.

Jasinski, P. ; International Microelectronics and Packaging Society -IMAPS-, Poland Chapter; Components, Packaging and Manufacturing Technology Society -CPMT-:
35th International Microelectronics and Packaging IMAPS - IEEE CPMT Poland Conference 2011. Proceedings. CD-ROM : September 21 - 24, 2011, Gdan'sk - Sobieszewo
Gdansk: Gdansk University of Technology, Faculty of Electronics, Telecommunications and Informatics, 2011
ISBN: 978-83-607-7914-9
International Microelectronics and Packaging Society, Poland Chapter (IMAPS Conference) <35, 2011, Gdansk>
Fraunhofer IKTS ()
Bedrucken; Gasströmung; 3D-Druck; Partikelgrößenverteilung; Aerosolbehandlung; Aerosol; kontinuierliche Strömung

The paper presents a new printing technology for the deposition of 3D high-resolution functional films for ceramic thick-film and LTCC applications. The aerosol printing technology uses a pneumatic or an ultrasonic 'atomizer' to bring micro droplets into a continuous gas flow. At the printing head a sheet gas focuses the gas flow. The long focus length ensures the 3D printing capability. Ink characteristics as particle size distribution, viscosity or wetting behavior have to be controlled very carefully as well as the printing parameters (gas flow, ink reservoir temperature, substrate table velocity and temperature). With optimized inks and printing parameters, line widths of 10 µm are achievable. Applications for aerosol printed films are LTCC rapid prototyping, repair as well as highreso lution structures for high frequency and sensors applications.