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ITO replacements. Insulator-metal-insulator layers

: Szyszka, B.


Chen, Janglin (Ed.):
Handbook of visual display technology. Vol.2
Berlin: Springer, 2012 (Springer reference)
ISBN: 978-3-540-79566-7 (Print)
ISBN: 978-3-540-79568-1
ISBN: 978-3-540-79567-4
Aufsatz in Buch
Fraunhofer IST ()

Insulator-metal-insulator (IMI) films open up novel pathways for highly conductive transparent electrode applications with sheet resistivity of less than 10 Omega/?. IMI films utilize thin metallic layers such as silver with thickness in the order of 10-15 nm to provide electrical conductivity. This metal is embedded in dielectric layers for antireflection and corrosion protection. Such layers can be deposited by magnetron sputtering either on rigid substrates or on polymeric web without substrate heating at high deposition rate. Also, concepts for fine pattering of IMI films are available. This section gives a brief overview of the technology.