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Quality assessment of precision optical surfaces through light scattering techniques

: Schröder, Sven; Finck, Alexander von; Herffurth, Tobias; Duparré, Angela


Optical Society of America -OSA-, Washington/D.C.:
Optical Fabrication and Testing : Part of Imaging and applied optics ; 24 - 28 June 2012, Monterey, California, United States
Washington, DC: OSA, 2012 (OSA Technical digest series)
ISBN: 1-55752-947-7
ISBN: 978-1-55752-947-3
Paper JTu5A.10
Conference "Optical Fabrication and Testing" (OFT) <2012, Monterey/Calif.>
Fraunhofer IOF ()

Light scattering methods are extremely capable for the characterization of optical surfaces. This will be demonstrated for different applications ranging from anisotropic diamond-turned surfaces to polished surfaces exhibiting defects.