Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Back-end-of the line compatible homogeneous coating of vertical aligned carbon nanotubes with a conductive diffusion barrier for interconnect applications
| 3rd International Conference on Nanotechnology: Fundamentals and Applications, ICNFA 2012. Proceedings. CD-ROM
Ottawa: Avestia Publishing, 2012
ISBN: 978-0-9867183-3-5 |
| International Conference on Nanotechnology - Fundamentals and Applications (ICNFA) <3, 2012, Montreal> |
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| Englisch |
| Konferenzbeitrag |
| Fraunhofer ENAS () |