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Laser micromachining and micro hot embossing for highly integrated lab-on-chip systems
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2012
Conference Paper
Titel
Laser micromachining and micro hot embossing for highly integrated lab-on-chip systems
Author(s)
Enderlein, Tom
Baum, Mario
Nestler, J.
Otto, Thomas
Besser, J.
Wiemer, Maik
John, B.
Hänel, J.
Geßner, Thomas
Hauptwerk
Smart Systems Integration 2012. CD-ROM
Konferenz
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2012
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS