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LTCC membranes with integrated heating structures, temperature sensors and strain gauges

: Gutzeit, N.; Müller, J.; Reinlein, C.; Gebhardt, S.


TU Wien, Institut für Sensor- und Aktuatorsysteme -ISAS-, Wien; Institute of Electrical and Electronics Engineers -IEEE-; IEEE Components, Packaging, and Manufacturing Technology Society:
ISSE 2012, 35th International Spring Seminar on Electronics Technology. Proceedings : Power Electronics, Bad Aussee, Austria, May 9-13, 2012
New York, NY: IEEE, 2012
ISBN: 978-1-4673-2241-6 (Print)
ISBN: 978-1-4673-2239-3 (Online)
ISBN: 978-1-4673-2240-9
International Spring Seminar on Electronics Technology (ISSE) <35, 2012, Bad Aussee>
Fraunhofer IKTS ()
base components; conductor paste; deformable mirror; different geometry; heating structures; integrated sensor; manufacturing process; post-fire; resistance temperature; sensor element; temperature treatments; wavefront correction; high energy lasers; power electronics; sensor

In this paper the challenging manufacturing process of a deformable mirror for the wave front correction of a high energy laser is described. During this process the LTCC membrane as the base component with integrated sensors must endure several postfire processes at temperatures of up to 900°C without any degradation of the sensors' characteristics. In order to optimize the sensors, various combinations of resistor and conductor pastes and different geometries are characterized. The usability and the performance of the sensor elements after temperature treatment are investigated by measuring the resistance and its resistance temperature characteristic.