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Absorption limited performance of SiO2/Al2O3 multi-layer coatings at 193nm - a systematic study
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2001
Conference Paper
Titel
Absorption limited performance of SiO2/Al2O3 multi-layer coatings at 193nm - a systematic study
Author(s)
Thielsch, R.
Heber, J.
Kaiser, N.
Apel, O.
Mann, K.
Ristau, D.
Blaschke, H.
Arens, W.
Hauptwerk
Optical Interference Coatings
Konferenz
Topical Meeting on Optical Interference Coatings 2001
Language
English
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Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF