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Hybrid Integration of Microoptical Systems - Step by Step to Wafer Scale Integration

: Karthe, W.; Eberhardt, R.; Scheller, T.

Weck, M. ; Fraunhofer-Institut für Produktionstechnologie -IPT-, Aachen; European Society for Precision Engineering and Nanotechnology -EUSPEN-:
International Seminar on Precision Engineering and Microtechnology 2000. Proceedings : July 19th - 20th 2000, Aachen, Germany
Voerde: Rhiem, 2000
ISBN: 3-926832-24-X
International Seminar on Precision Engineering and Micro Technology <2000, Aachen>
Fraunhofer IOF ()
microassembly; microoptics; alignment; hybrid integration; wafer scale integration

Miniaturizing in optics is more and more of interest for many fields of application. First of all smaller and more light-weight devices are needed in medicine e. g. for minimalinvasive diagnostics and surgery and for point-of-care treatment and personal health treatment, in communication technology for photonic networks just as in personal-oriented devices, in production technology e. g. as optical sensors in the tools. Further reasons are less power consumption, higher reliability and in many cases economy-priced fabrication of miniaturized optical systems.