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2000
Conference Paper
Titel
Hybrid Integration of Microoptical Systems - Step by Step to Wafer Scale Integration
Abstract
Miniaturizing in optics is more and more of interest for many fields of application. First of all smaller and more light-weight devices are needed in medicine e. g. for minimalinvasive diagnostics and surgery and for point-of-care treatment and personal health treatment, in communication technology for photonic networks just as in personal-oriented devices, in production technology e. g. as optical sensors in the tools. Further reasons are less power consumption, higher reliability and in many cases economy-priced fabrication of miniaturized optical systems.