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Hybrid assembly of microoptical systems

: Eberhardt, R.; Mohaupt, M.; Scheller, T.

Verband der Elektrotechnik, Elektronik, Informationstechnik -VDE-:
MICRO.tec 2000. VDE World Microtechnologies Congress: Applications - Trends - Visions. Proceedings. Vol.1 : VDE World Microtechnologies Congress, September 25 - 27, 2000, Expo 2000, Hannover, Germany
Berlin: VDE-Verlag, 2000
ISBN: 3-8007-2579-7
World Microtechnologies Congress (MICROTEC) <2000, Hannover>
Fraunhofer IOF ()
microassembly; microoptics; alignment; hybrid integration

During the last years micro-optical and opto-electronic systems are in instrumentation and represent a huge potential for miniaturised systems. In these terms different kinds of microlenses and microparts have been used to achieve the desired optical function. One of the most critical obstacles achieving a cost-effective solution of the assembly is the integration of an alignment and positioning process within tolerances of few microns.