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Sophisticated light scattering techniques from the VUV to the IR regions

: Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Finck, Alexander von; Duparré, Angela


Hanssen, Leonard M. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Reflection, Scattering, and Diffraction from Surfaces III : 13 - 16 August 2012, San Diego, California, USA
Bellingham, WA: SPIE, 2012 (Proceedings of SPIE 8495)
ISBN: 978-0-8194-9212-8
Paper 84950V
Conference "Reflection, Scattering, and Diffraction from Surfaces" <3, 2012, San Diego/Calif.>
Fraunhofer IOF ()

Light scattering based characterization techniques are well suited to meet the challenging requirements for fast and sensitive finish assessment of optical surfaces. Further advantages are the high flexibility and robustness which enable the inspection of large geometries and freeform optics that are sometimes too complex for characterization techniques like atomic force microscopy or white light interferometry. In this paper, we report on the development of instruments for total and angle resolved light scattering measurements at wavelengths ranging from the vacuum ultraviolet to the infrared spectral regions. Extremely high sensitivities equivalent to surface roughness levels of below 0.1 nm and dynamic ranges of up to 15 orders of magnitude have been achieved. In addition to laboratory-based equipment, compact and table-top tools are discussed which enable the advantages of light scattering metrology to be used for characterization tasks close to or even in manufacturing processes. Instructive examples of applications are presented ranging from the characterization of diamond-turned and polished substrates to interference coatings, diffraction gratings, and IR window materials.