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Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors
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2003
Conference Paper
Titel
Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors
Author(s)
Lemberger, M.
Paskaleva, A.
Zürcher, S.
Bauer, A.J.
Frey, L.
Ryssel, H.
Hauptwerk
Dielectrics in microelectronics, WoDiM 2002
Konferenz
Workshop on Dielectrics in Microelectronics (WoDiM) 2002
DOI
10.1016/S0026-2714(03)00180-X
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB