English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Zirconium silicate films obtained from novel MOCVD precursors
Details
Full
Export
Statistics
Options
2003
Conference Paper
Titel
Zirconium silicate films obtained from novel MOCVD precursors
Author(s)
Lemberger, M.
Paskaleva, A.
Zürcher, S.
Bauer, A.J.
Frey, L.
Ryssel, H.
Hauptwerk
SiO 2 and advanced dielectrics
Konferenz
Franco-Italian Symposium on SiO2 and Advanced Dielectrics 2002
DOI
10.1016/S0022-3093(03)00195-9
Language
English
google-scholar
View Details
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB