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Influence of antenna shape and resist patterns on charging damage during ion implantation
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2003
Conference Paper
Titel
Influence of antenna shape and resist patterns on charging damage during ion implantation
Author(s)
Dirnecker, T.
Bauer, A.J.
Beyer, A.
Frey, L.
Henke, D.
Ruf, A.
Ryssel, H.
Hauptwerk
Ion implantation technology, IIT 2002
Konferenz
International Conference on Ion Implantation Technology (IIT) 2002
DOI
10.1109/IIT.2002.1257996
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB