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Fiber-coupled ozone sensor based on tuning fork-enhanced interferometric photoacoustic spectroscopy

: Kohring, M.; Willer, U.; Böttger, S.; Pohlkötter, A.; Schade, W.


IEEE Journal of Selected Topics in Quantum Electronics 18 (2012), Nr.5, S.1566-1572
ISSN: 1077-260X
Fraunhofer HHI ()

In this paper, a completely fiber-coupled ozone sensor based on tuning fork (TF)-enhanced photoacoustic spectroscopy is presented. Crystalline silicon micro-TFs are processed and characterized. Their photoacoustically induced motion is monitored by a compact intensity interferometer. An acoustic microresonator for this new type of TFs is optimized. A frequency-doubled Nd:YAG laser is used as an excitation source. The sensor performance is assessed by calibration measurements. It reaches a detection limit of S = 2.13 ppm +/- 0.02 ppm and a noise-equivalent absorption sensitivity of D = (1.27 x 10(-9) +/- 1.2 x 10(-11)) cm(-1) W(Hz)(-1/2).