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Micromirror arrays for wavefront correction

: Gehner, A.; Wildenhain, M.; Lakner, H.

Motamedi, M.E.:
MOEMS and miniaturized systems. Proceedings : 18-19 Sept. 2000, Santa Clara, Calif.
Bellingham/Wash.: SPIE, 2000 (SPIE Proceedings Series 4178)
ISBN: 0-8194-3834-0
S.348-357 : Lit.
Conference on MOEMS and Miniaturized Systems <2000, Santa Clara/Calif.>
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
Adaptive Optik; Mikrospiegelchip; Flächenlichtmodulator; MOEMS; Wellenfrontkorrektur; Senkspiegel; Oberflächenmikromechanik

For wavefront correction in adaptive optics mirror devices are required, which provide a pure phase shift capability with a fine partition over the optical cross section. For this purpose we investigated arrays of piston-type micromirrors. In order to predetermine the basic deformation characteristics and to estimate appropriate design parameters a simple analytical model was derived. We then designed and fabricated arrays of different mirror elements on top of passive address devices by means of surface-micromachining realizing pixel side lengths of 75, 100, 120 and 150µm. Experimental investigations of the electromechanical behaviour were done by surface profile measurements using white light interferometry, which reveals a good overall functionality of the mirroarrays. Furthermore an analog deflection range of up to 1.2 µm at address voltages below 32 V were obtained together with a load dependent height level accuracy of 80 to 100 nm.