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Verfahren zum Abscheiden dielektrischer Schichten im Vakuum sowie Verwendung des Verfahrens

Method for separating dielectric layers in a vacuum and use of the method
 
: Bartzsch, H.; Frach, P.; Fahland, M.; Gottfried, C.; Pötschick, P.

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Frontpage ()

DE 102010055659 A
Deutsch
Patent, Elektronische Publikation
Fraunhofer FEP ()

Abstract
Depositing a dielectric layer on a substrate (12) in a vacuum chamber (11), comprises sputtering at least one material including aluminum, titanium, hafnium, tantalum, niobium, zirconium, and zinc doped silicon, which are comprised in a target (14) using a magnetron. The flow rates of the reactive gas and the precursor in the vacuum chamber are adjusted such that, both products from the reaction of the sputtered target particles with the reactive gas and products from the reaction of precursor constituents with the reactive gas forms to at least 20% of the layer structure. Depositing a dielectric layer on a substrate (12) within a vacuum chamber (11), comprises sputtering at least one material including aluminum, titanium, hafnium, tantalum, niobium, zirconium, and zinc doped silicon, which are comprised in at least one target (14), using at least one magnetron, during supplying a working gas and a reactive gas into the vacuum chamber. A silicon-containing precursor is inserted into the vacuum chamber during the sputtering. The flow rates of the reactive gas and the precursor in the vacuum chamber are adjusted such that, both products from the reaction of the sputtered target particles with the reactive gas and products from the reaction of precursor constituents with the reactive gas forms to at least 20% of the layer structure. An independent claim is also included for a use of the method for depositing a dielectric multilayer system, comprising depositing at least one first dielectric layer by the method, and at least one second dielectric layer by means of a magnetron-sputtering method in any sequence.

: http://publica.fraunhofer.de/dokumente/N-214494.html