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Haltevorrichtung für Substrate sowie Verfahren zur Beschichtung eines Substrates

RETAINING DEVICE FOR SUBSTRATES AND METHOD FOR COATING A SUBSTRATE
 
: Reber, S.; Schillinger, N.; Arnold, M.; Pocza, D.

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Frontpage ()

DE 102010055675 A
Deutsch
Patent, Elektronische Publikation
Fraunhofer ISE ()

Abstract
The invention relates to a retaining device for substrates to be coated, which device comprises a contact surface for the substrate to be coated. The retaining device is for example configured as a plate on which the substrate rests and which has one or more apertures, e.g. drilled holes, grooves etc. has, through which a pressure gradient can be set between the face of the substrate and the opposite face of the retaining device. In this way a temporary fixing of the substrate by suction onto the retaining device is possible. The invention also relates to a method for coating a substrate which uses the retaining device according to the invention.

: http://publica.fraunhofer.de/dokumente/N-214493.html