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Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale

Poster at 16th biannual conference of Insulating Films on Semiconductors (INFOS 2009), 29.06.-01.07.2009, Cambridge University, UK
: Yanev, V.; Erlbacher, T.; Rommel, M.; Bauer, A.J.; Frey, L.

Poster urn:nbn:de:0011-n-2124602 (1.5 MByte PDF)
MD5 Fingerprint: f38b3614c7ffddee0bd9345b7febb25d
Erstellt am: 4.9.2012

2009, 1 Folie
Biannual Conference of Insulating Films on Semiconductors (INFOS) <16, 2009, Cambridge>
Poster, Elektronische Publikation
Fraunhofer IISB ()
tunneling atomic force microscopy (TUNA); conductive atomic force microscopy (c-AFM); high-k dielectrics