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The MEMS micro scanning mirror for barcode reading: From development to production

: Wolter, A.; Schenk, H.; Gaumont, E.; Lakner, H.


Urey, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS display and imaging systems II : 26 - 27 January 2004, San Jose, California, USA
Bellingham/Wash.: SPIE, 2004 (SPIE Proceedings Series 5348)
ISBN: 0-8194-5256-4
Conference on MOEMS Display and Imaging Systems <2004, San Jose/Calif.>
Fraunhofer IPMS ()
Barcode-Scanning; micro scanning mirror; optical MEMS; MOEMS; laser beam deflection; bulk-micromachining; out-of-plane comb drive

The micro scanning mirror with lateral out-of-plane comb drives is on its way to volume fabrication. This article reviews the development and highlights the most important activities and decisions that are representative for many MEMS devices that are supposed to go the same way.
Careful analysis of the product requirements, design for reliability, design for testability, design for packaging, a mature process, and automated testing preferably on wafer-level have been identified as keys to volume fabrication of MEMS.