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In-plane polarized PZT thick film actuators by screen printing technology

: Ernst, D.; Bramlage, B.; Gebhardt, S.

Postprint urn:nbn:de:0011-n-2093507 (355 KByte PDF)
MD5 Fingerprint: e133f6ff7644768454b9502023bd4f40
Erstellt am: 8.8.2012

Actuator 2012, 13th International Conference on New Actuators & 7th International Exhibition on Smart Actuators and Drive Systems. Conference Proceedings : Bremen Convention Center, 18-20 June 2012
Bremen: Messe Bremen, 2012
ISBN: 978-3-933339-20-1 (CD-ROM)
ISBN: 978-3-933339-19-5
International Conference on New Actuators <13, 2012, Bremen>
International Exhibition on Smart Actuators and Drive Systems <7, 2012, Bremen>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IKTS ()
PZT; thick film; piezoceramic; MEMS; in-plane; interdigitated electrode; screen printing

Screen printed PZT thick films offer distinct advantages in MEMS applications. The net shaped low profile devices enable small packaging space and a very good adhesion to the substrate material. At Fraunhofer IKTS a standard technology for producing dense PZT thick films based on a soft PZT material is available. Previously the established mode of excitation was through-thickness. To increase cantilever performance we applied interdigitated electrodes to realize in-plane polarization of PZT thick films. Experimental data and FEM simulations will be presented.