Options
2012
Conference Paper
Titel
In-plane polarized PZT thick film actuators by screen printing technology
Abstract
Screen printed PZT thick films offer distinct advantages in MEMS applications. The net shaped low profile devices enable small packaging space and a very good adhesion to the substrate material. At Fraunhofer IKTS a standard technology for producing dense PZT thick films based on a soft PZT material is available. Previously the established mode of excitation was through-thickness. To increase cantilever performance we applied interdigitated electrodes to realize in-plane polarization of PZT thick films. Experimental data and FEM simulations will be presented.