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Cleaning of structured templates from nanoparticle accumulation using silicone

: Merzsch, S.; Wasisto, H.S.; Waag, A.; Kirsch, I.; Uhde, E.; Salthammer, T.; Peiner, E.


Microsystem Technologies 18 (2012), Nr.7-8, S.835-842
ISSN: 0946-7076
Fraunhofer WKI ()

Polydimethylsiloxan (PDMS) turned out to be a simple and cost efficient material for the removal of nanoparticles from patterned surfaces. After molding the particle-laden surface using liquid silicone, surface cleaning is realized by curing the PDMS comprising the encapsulated particles and subsequent removal. The method is proven for silicon, SiO 2 and gold surfaces occupied by carbon and Polytetrafluorethylen (PTFE or Teflon) particles. Samples up to 2 inch wafers were successfully cleaned. The effect of PDMS on the surface energy is verified by contact angle measurements showing a clear change in wetting for H 2O. This effect is abolished by oxygen plasma and HF-Dip.