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Laser projector solution based on two 1D resonant scanning micromirrors assembled in a low vertical distortion scan head

: Grahmann, J.; Wildenhain, M.; Graßhoff, T.; Gerwig, C.; Dallmann, H.-G.; Wolter, A.; Schenk, H.


Schenk, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and miniaturized systems XI : 24 - 25 January 2012, San Francisco, California
Bellingham, WA: SPIE, 2012 (Proceedings of SPIE 8252)
ISBN: 978-0-8194-8895-4
Paper 825205
MOEMS and Miniaturized Systems Conference <11, 2012, San Francisco/Calif.>
Photonics West Conference <2012, San Francisco/Calif.>
Fraunhofer IPMS ()

A Scan Head package including two 1D resonant electrostatic driven micro scanning mirrors with piezoresistive position detection was developed. The scanning frequency of the slow and the fast axis is 100Hz and 29,05kHz, allowing WVGA-resolution. Thereby the Scan Head design reduces vertical distortion strongly and can potentially be assembled automatically. In addition FPGA based video processing electronic was developed to improve the sorting of the picture information corresponding to the Lissajous figure with the objective of high picture contrast and a homogeneous brightness.