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Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications

: Jung, Denis; Sandner, Thilo; Kallweit, David; Schenk, Harald


Schenk, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and miniaturized systems XI : 24 - 25 January 2012, San Francisco, California
Bellingham, WA: SPIE, 2012 (Proceedings of SPIE 8252)
ISBN: 978-0-8194-8895-4
Paper 82520U
MOEMS and Miniaturized Systems Conference <11, 2012, San Francisco/Calif.>
Photonics West Conference <2012, San Francisco/Calif.>
European Commission EC
FP7-ICT; 248623; TACO
Fraunhofer IPMS ()

This paper describes in detail our concept of quasi-static micro scanning mirrors enabling large static deflections and linearized scanning using vertical out-of-plane comb drives. The vertical comb configuration is realized from a planar scanner substrate by wafer bonding. The device concept is highly flexible by design; different kinds of vertical combs (e.g. staggered and angular) can be realized without changing the technological process flow but by design modifications, only. First demonstrator devices are presented: a) quasi-static 1D-scanners with 4 mm mirror diameter and ±7.5° mechanical tilt angle for beam steering and b) a quasi-static / resonant 2D-scanner enabling 2D raster scanning with SVGA resolution.