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Polymer UV-molding for micro-optical systems and O/E-integration

 
: Dannberg, P.; Mann, G.; Wagner, L.; Bräuer, A.

:

Lee, S.H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Micromachining Technology for Micro-Optics
Bellingham/Wash.: SPIE, 2000 (SPIE Proceedings Series 4179)
ISBN: 0-8194-3835-9
S.137-145
Conference "Micromachining Technology for Micro-Optics" <2000, Santa Clara/Calif.>
Englisch
Konferenzbeitrag
Fraunhofer IOF ()
polymer micro-optics; replication; UV moulding; microlens array; fiber array; VCSEL; hybrid integration; wafer scale

Abstract
The potential and limits of micromoulding technology for the wafer scale hybrid integration of micro-optic elements on top of arbitrary substrates like glass, Silicon, III/V-semiconductors by a process which is performed in a modified contact mask aligner. The elements are characterised by high precision and stability, temperature stable and precise pitch, index, homogeneity, uniformity across the wafer, and they fulfill additional requirements for a practical application (AR-coating,
separation in a dicing saw). Additionally, the technology for a two-sided replication of elements has been developed. The precision of lens arrays fabricated by reflow and UV-moulding is investigated, and the high performance of these arrays in the collimation of fiber arrays is shown. Steps toward a wafer scale integration of lens arrays with vertical cavity surface emitting lasers (VCSELs) by locally selective replication are demonstrated.

: http://publica.fraunhofer.de/dokumente/N-2058.html